Waferpedia

Tool family

SUSS MicroTec MJB

Models in this family

  1. The SUSS MJB 3 Mask Aligner is a lithography system designed for 3-inch wafers, using a 350W Hg lamp and UV400 near UV optics with 0.6 µm resolution.

  2. The SUSS MJB 4 Mask Aligner is a mask aligner used for contact exposure and alignment, with source-stated support for wafers up to 4 inches in diameter.

All entries

  1. MJB 3 MaskSUSS MicroTec

    The SUSS MJB 3 Mask Aligner is a lithography system designed for 3-inch wafers, using a 350W Hg lamp and UV400 near UV optics with 0.6 µm resolution.

    CategoryLithography
    14 specs
  2. MJB 4 MaskSUSS MicroTec

    The SUSS MJB 4 Mask Aligner is a mask aligner used for contact exposure and alignment, with source-stated support for wafers up to 4 inches in diameter.

    CategoryLithography
    29 specs