Waferpedia

Tool family

Varian EHPI 500

VarianIon Implantation2 entries
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Models in this family

  1. EHPI 500

    The Varian EHPi 500 is a medium current ion implanter offering an energy range of 5–260 keV (X+) and capable of handling wafer sizes up to 200 mm for features down to 0.18 µm.

  2. EHPI 500 Medium Current

    The Varian EHPI 500 Medium Current is a medium-current ion implanter.

All entries

  1. EHPI 500Varian

    The Varian EHPi 500 is a medium current ion implanter offering an energy range of 5–260 keV (X+) and capable of handling wafer sizes up to 200 mm for features down to 0.18 µm.

    CategoryIon Implantation
    25 specs
  2. EHPI 500 Medium CurrentVarian

    The Varian EHPI 500 Medium Current is a medium-current ion implanter.

    CategoryIon Implantation
    11 specs