Waferpedia

Manufacturer

SVG

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36 entries

  1. Rite Track 8800SVG
  2. Thermco 5204 DiffusionSVG

    The SVG Thermco 5204 Diffusion Furnace is a thermal diffusion system for 150 mm (6 inch) wafers with a 40 inch flat zone.

    CategoryThermal / Diffusion
  3. OT 7 8 9 TrackSVG

    The SVG OT 7 8 9 Track is a semiconductor track system for 6-inch wafers.

  4. OT 4 5 6 TrackSVG

    The SVG OT 4 5 6 Track is a wafer track system for 8-inch wafers.

  5. 8626 PhotoresistSVG

    The SVG 8626 is a 6-inch cassette-to-cassette photoresist coater with a 2-coat configuration and pumps excluded.

    CategoryResist Processing
  6. 8626 8636SVG

    The SVG 8626/8636 is a coater that supports 4-inch wafers and was introduced in 1993.

  7. 300 HT LithographySVG

    The SVG / Perkin Elmer 300 HT Lithography Tool is a lithography system manufactured by SVG/Perkin Elmer.

    CategoryLithography
  8. 8632 CTD DSVG
  9. 8820 TrackSVG

    The SVG 8820 Track is a wafer track system manufactured by SVG for 4-inch wafers.

  10. 90 SSVG

    The SVG 90 S is a coater/developer made by SVG for 8-inch wafers.

  11. Series 90 S SpreadingSVG

    The SVG Series 90 S Spreading is a spreading machine manufactured by SVG.

  12. 8826 36 Track PhotoresistSVG
  13. 8800SVG

    The SVG 8800 is a single-track photoresist coater and developer system for semiconductor wafer processing.

  14. SVG 90 S Linear Wafer TracksSVG

    The SVG 90 S Linear Wafer Tracks is a resist coater and developer for 6-inch wafers.

  15. Rite Track 8620 High Pressure SpraySVG

    The SVG / Rite Track 8620 High Pressure Spray is a semiconductor processing tool for 6-inch wafers.

  16. 8836 HPO PhotoresistSVG

    The SVG 8836 HPO is a dual-track photoresist coater and developer from the SVG 8800 series, handling 6-inch and 8-inch wafers.

  17. 90 Coater Developer TrackSVG

    SVG 90 Coater / Developer Track is a semiconductor equipment model identified by SVG.

  18. AIO 8632 Resist / Development TrackSVG

    SVG AIO 8632 Resist / Development Track is a track system configured for coating and development with two single-dispense tracks.

  19. 9032 SpinSVG
  20. 90 S SpinSVG

    The SVG 90 S is a spin coater / developer manufactured by SVG.

  21. 90 SE TrackSVG

    The SVG 90 SE Track is a track system manufactured by SVG.

  22. Rite Track 90 S Coater / Developer TrackSVG

    SVG Rite Track 90 S is a coater/developer track identified by model 90 S.

  23. 8620 SSC WaferSVG

    The SVG 8620 SSC Wafer is a wafer scrubber used in wet processing and cleaning applications in semiconductor manufacturing.

    CategoryWet Processing / Clean
  24. 81SVG
  25. Computer Power ControlSVG
  26. Series 90 S Photoresist BakingSVG

    The SVG Series 90 S is a photoresist baking machine used in semiconductor manufacturing.

  27. 8626SVG

    The SVG 8626 is a developer for 6-inch wafers, described as a cassette-to-cassette, 2-coat system that excludes pumps.

  28. SVG 90 Linear Wafer TracksSVG

    The SVG 90 Linear Wafer Tracks are semiconductor resist coater/developer equipment for 8-inch wafers.

  29. 86SVG

    The SVG 86 is a coater/developer with a track 1 sender-coat-receiver configuration and a track 2 sender-developer-receiver configuration.

    CategoryResist Processing
  30. Thermco 5000 DiffusionSVG

    The SVG Thermco 5000 Diffusion Furnace is a diffusion furnace with a 6 inch wafer size.

    CategoryThermal / Diffusion
  31. 7000SVG

    The SVG 7000 is a chemical vapor deposition (CVD) system for 6-inch wafers, convertible to 8-inch.

    CategoryDeposition
  32. Rite Track 8800 TrackSVG

    The SVG / Rite Track 8800 Track is a track system for semiconductor wafer processing.

  33. SVG 8800 Linear Wafer TracksSVG

    The SVG 8800 Linear Wafer Tracks are resist coater/developer equipment for 6-inch wafers.

  34. 661 HTSVG

    The SVG 661 HT is a lithography mask and wafer handling aligner for photo exposure applications.

    CategoryLithographyWaferMask / Wafer Handling:
  35. 8620 Dual Track WaferSVG
    CategoryWet Processing / Clean
  36. 88SVG

    SVG 88 is a coater configured for 6-inch and 8-inch wafers.

    CategoryThermal / Diffusion