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The Trion Titan Loadlock is a plasma deposition system configured for 3-inch wafers.
The Trion Apollo is a compact photoresist stripping system that handles wafer sizes from 100mm to 300mm and uses a downstream inductively coupled plasma (ICP) or microwave source with RF bias for low-temperature resist removal.
The Trion Sirus T 2 is a deep reactive ion etch system.