Waferpedia

ADT

966 Wafer Mounting

ADT 966 Wafer Mounting family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The ADT 966, also designated as the WM-966, is a manual wafer mounter from Advanced Dicing Technologies that mounts workpieces onto dicing frames using tape. The ADT 966 supports workpieces up to 200 mm (8 inches) in diameter and provides uniform tape tension without air bubbles. The ADT 966 includes a temperature-controlled chuck heater, an anti-static roller, and a built-in UV back tape collector.[1]

ADT966 Wafer Mounting
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What is it?

The ADT 966 is a manual wafer mounter designed for mounting workpieces on dicing tape, accommodating a wide range of tape varieties and standard frames.

What do the numbers mean?

Vacuum & pumping1

Built-in vacuum holder
Yes[1]
Accurate?

Wafer handling1

Temperature-controlled chuck heater
Yes[1]
Accurate?

Dimensions & facilities2

Machine dimensions (W x D x H)
420 x 860 x 370 mm[1]
Accurate?
Approx. machine weight
45 kg[1]
Accurate?

Configuration & options5

Supported tapes
Dicing Blue-tapes / UV tapes[1]
Accurate?
Max workpiece size
Ø 200 mm (8 inch)[1]
Accurate?
Supported film frames
DTF 2-8-1; DTF 2-6-1; 350-103; 350-104; DTF-2-12; SEMI-G74[1]
Accurate?
UV back tape collector
Yes[1]
Accurate?
Anti-static roller
Yes[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
966L——Supports workpieces up to 300 mm (12 inch); different supported film frames (350-103, 350-104, SEMI-G74); machine dimensions 550 x 1000 x 310 mm; weight 60 kg.adt-co.com[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Built-in vacuum holderYes[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 966 Wafer Mounting are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 966 Wafer Mounting are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 966 Wafer Mounting are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 966 Wafer Mounting are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 966 Wafer Mounting is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 966 Wafer Mounting are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]adt-co.com — adt-co.comadt-co.com
  2. [2]Equipment inventory listing
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Last updated Sep 29, 2026.

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