Advanced Energy
Apex
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Advanced Energy Apex RF generator is a high-power-density RF generator family for plasma applications. The Apex supports power levels from 1.5 kW to 10 kW at 13.56 MHz and offers compact mounting options including chamber mount, frame mount, and rack mount. Apex generators integrate wideband control loops, optional pulsing, and advanced arc management for improved yield and process reliability.[1][2]
What it is
How it works
The Apex generates RF power at a nominal frequency of 13.56 MHz and delivers controlled output for plasma processes.[1][2]
The Apex uses RF-conversion technology, wideband control loops, optional pulsing, and arc management to stabilize plasma operation and improve delivered-power repeatability.[1][2]
The Apex platform supports multiple communications options, including RS-232 and additional digital serial interface options, for integration with process tools.[2][1]
Applications
What do the numbers mean?
Power & electrical18
Performance1
- Forward Power Regulation Accuracy
- +/-1% of set point or +/-0.1% full-rated output power (whichever greater) into 50 Ohm non-reactive load[2]
Control & software3
Dimensions & facilities3
Configuration & options10
- Forward Power Regulation
- ±1% of set point or ±0.1% full-rated output power, whichever is greater, into 50 Ω non-reactive load[2]
- Mounting options
- On-board chamber mount, on-tool frame mount, rack mount, shoebox options[1]
- Regulatory compliance
- CE marked; complies with EN50178, EN50091-2, EN50082-2, FCC Part 18, SEMI S2, F47; most models also comply with UL1012 and CSA 107.1[2]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 1.5 kW | — | — | Dimensions: 132.59 mm (H) x 215.14 mm (W) x 425.96 mm (D); RF output power 1.5 kW into 50 Ω non-reactive load. | advancedenergy.com[2] |
| 3 kW | — | — | Dimensions: same as 1.5 kW model; RF output power 3 kW into 50 Ω non-reactive load. | advancedenergy.com[2] |
| 5.5 kW | — | — | Dimensions: same as 1.5 kW model; RF output power 5.5 kW into 50 Ω non-reactive load. | advancedenergy.com[2] |
| 10 kW | — | — | Dimensions: 133.35 mm (H) x 482.6 mm (W) x 601.29 mm (D) (3U 19" rack); RF output power 10 kW into 50 Ω non-reactive load. | advancedenergy.com[2] |
| 1.5 kW model | — | — | Lower power model with half-rack form factor. | advancedenergy.com[2] |
| 3 kW model | — | — | Mid power model with half-rack form factor. | advancedenergy.com[2] |
| 5.5 kW model | — | — | Higher power model with half-rack form factor. | advancedenergy.com[2] |
| 10 kW model | — | — | Highest power model with full 19-inch rack form factor. | advancedenergy.com[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Output Frequency13.56 MHz[1]
- Input Voltage208 VAC[1]
- Power Level Range1.5 kW to 10 kW[1]
- Form Factor (Models 1.5, 3, 5.5 kW)132.59 mm (H) x 215.14 mm (W) x 425.96 mm (D)[2]
- Form Factor (Model 10 kW)133.35 mm (H) x 482.6 mm (W) x 601.29 mm (D) (3U 19" rack)[2]
- Product typeRF generator family and power-delivery systems[1]
- Power level1.5 to 10 kW[1]
- RF Output Power and Regulation (1.5 kW model)1.5 kW into 50 Ω non-reactive load[2]
- RF Output Power and Regulation (3 kW model)3 kW into 50 Ω non-reactive load[2]
- RF Output Power and Regulation (5.5 kW model)5.5 kW into 50 Ω non-reactive load[2]
- RF Output Power and Regulation (10 kW model)10 kW into 50 Ω non-reactive load[2]
- Dimensions (1.5 kW, 3 kW, 5.5 kW models)132.59 mm (H) x 215.14 mm (W) x 425.96 mm (D)[2]
- Dimensions (10 kW model)133.35 mm (H) x 482.6 mm (W) x 601.29 mm (D)[2]
- Physical Dimensions (1.5/3/5.5 kW)132.59 mm H x 215.14 mm W x 425.96 mm D[2]
- Physical Dimensions (10 kW)133.35 mm H x 482.6 mm W x 601.29 mm D[2]
- Power Level Range1.5 to 10 kW[1]
- RF Output Frequency13.56 MHz[2]
- Product typeRF generator and power-delivery system family[1]
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
- Advanced Energy Apex 1513 RF Power SupplyIn Productionsource[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Apex are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Apex are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Apex are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Apex are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Apex is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the Apex are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]advancedenergy.com — advancedenergy.comadvancedenergy.com
- [2]advancedenergy.com — advancedenergy.comadvancedenergy.com
- [3]Equipment inventory listing
- [4]Equipment inventory listing
Last updated Oct 11, 2026.