Advanced Energy

PARAMOUNT-6013

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Advanced Energy PARAMOUNT-6013 is an RF generator. The PARAMOUNT-6013 operates at a frequency of 13.56 MHz and provides an output power of 6000 W.^[1]

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Advanced Energy PARAMOUNT-6013 is an RF generator used in semiconductor manufacturing equipment.^[2]^[3]^[4]

What do the numbers mean?

Power & electrical1

Frequency: 13.56 MHz^[1]

Configuration & options12

Part Number: 0190-44164-001 Model Number: 3156360-015 B^[2]
Part Number: 0190-44164-002 Model Number: 3156360-015 B^[3]
Output Power: 6000 W^[1]
Part Number (example): 0190-44164-001^[2]
Part Number (example): 0190-44164-002^[3]
Model Number (example): 3156360-015 B^[4]
Model Number (example): 3156360-060^[1]
Part Number (example): 660-106049-002^[1]
Part Number: 0190-44164-001^[2]
Part Number: 0190-44164-002^[3]
Model Number: 3156360-015 B^[2]
Model Number: 3156360-060^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Frequency13.56 MHz^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the output power of the PARAMOUNT-6013?

The PARAMOUNT-6013 has an output power of 6000 W.^[1]

What frequency does the PARAMOUNT-6013 operate at?

The PARAMOUNT-6013 operates at 13.56 MHz.^[1]

Who manufactures the PARAMOUNT-6013?

The PARAMOUNT-6013 is manufactured by Advanced Energy.^[2]^[1]

Not publicly documented

The following facts about the PARAMOUNT-6013 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PARAMOUNT-6013 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PARAMOUNT-6013 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PARAMOUNT-6013 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PARAMOUNT-6013 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PARAMOUNT-6013 is not on record.
Answerable by: an OEM datasheet or a fab qualification report