Waferpedia

Aixtron

G5HT

Aixtron G5HT family
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The Aixtron G5HT is a metal-organic chemical vapor deposition (MOCVD) reactor. The Aixtron G5HT is designed for epitaxial growth on 6-inch wafers. The Aixtron G5HT was manufactured around 2010-2011.[1]

AixtronG5HT
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What it is

The G5HT is capable of processing wafers up to 6 inches in diameter. The reactor is designated as an IC2 type in some configurations. The system is employed for metal-organic vapor deposition.[2][1][3]

What do the numbers mean?

Wafer handling1

Wafer Size
6 inch[2]
Accurate?

Gas & chemistry1

Process
Metal-Organic Chemical Vapor Deposition (MOCVD)[3]
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Configuration & options2

CVD
MOCVD/6in.[2]
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Reactor Type
IC2 G5HT[1]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
IC2 G5HT———auctions.thebranfordgroup.com[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ProcessMetal-Organic Chemical Vapor Deposition (MOCVD)[3]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of reactor is the G5HT?

The G5HT is a metal-organic vapor deposition (MOCVD) system.[3]

Is the G5HT used for epitaxy?

Yes, the G5HT is an epitaxial MOCVD reactor, as indicated by its designation as an 'Epi MOCVD Reactor'.[1]

Not publicly documented

The following facts about the G5HT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the G5HT are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the G5HT are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the G5HT are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the G5HT is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the G5HT are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]auctions.thebranfordgroup.com — auctions.thebranfordgroup.comauctions.thebranfordgroup.com
  2. [2]dealer listingwotol.com
  3. [3]asseta.com — asseta.comasseta.com
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Last updated Sep 24, 2026.

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