Applied Materials
Endura 5500 Metal Sputterer
What it is
The Applied Materials Endura 5500 Metal Sputterer is a semiconductor manufacturing deposition tool used for metal sputtering.[3]
How it works
General reference — not yet source-verifiedA metal sputterer deposits thin films by driving material from a target onto a wafer inside a vacuum chamber.
Where it fits in the process flow
General reference — not yet source-verifiedA sputtering deposition tool sits in the thin film formation portion of a semiconductor fab flow and is used after prior wafer preparation steps and before later patterning or integration steps.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Many missing or faulty parts, including DI board, cryo control board, and C3 lift driver.
What do the numbers mean?
Power & electrical1
Vacuum & pumping2
- Cryo control board[1]
Wafer handling4
Gas & chemistry1
Configuration & options13
- W × 2ch、Wsi × 1ch[1]
- No PreClean or PreHeat[1]
- DP is included[1]
- Many missing or faulty parts including:[1]
- DI board[1]
- C3 lift driver[1]
- DP is included[1]
- Chamber specification
- A - Pass Thru, B - Cooldown, C - PreClean PIK II, E,F - Orienter/Degas, 1 - Widebody AlCu, 2 - Watercool MCA+, 3 - Widebody TiN, 4 - Watercool MCA+[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Applied Materials Endura 5500?
It is a semiconductor manufacturing deposition tool described as a metal sputterer.[1]
Not publicly documented
The following facts about the Endura 5500 Metal Sputterer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Endura 5500 Metal Sputterer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Endura 5500 Metal Sputterer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Endura 5500 Metal Sputterer are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Endura 5500 Metal Sputterer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Endura 5500 Metal Sputterer are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]semistarcorp.comsemistarcorp.com
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]chinsortech.comchinsortech.com
Last updated Oct 4, 2026.
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