ASML
60 100 200 Steppers
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedHow it works
General reference — not yet source-verifiedA stepper exposes a wafer by projecting an image of a single die or a small field from a photomask through a reduction lens system onto a photoresist-coated wafer.
The wafer stage then steps to the next field position, and the exposure is repeated, building up the pattern across the entire wafer.
Where it fits in the process flow
General reference — not yet source-verifiedIn the semiconductor fabrication process, steppers are used in the lithography step, which occurs after a wafer has been cleaned and coated with photoresist.
After exposure, the wafer moves to a developer station where the exposed photoresist is removed, followed by etching, deposition, or other processing steps for that layer.
Applications
General reference — not yet source-verifiedSteppers of this class are used for patterning critical layers in integrated circuit manufacturing, such as transistor gates and interconnect levels.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
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Not publicly documented
Field notes
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Not publicly documented
The following facts about the 60 100 200 Steppers are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the 60 100 200 Steppers are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 60 100 200 Steppers are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 60 100 200 Steppers are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 60 100 200 Steppers are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 60 100 200 Steppers are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Oct 9, 2026.
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