ASML
URS 5000 55 B
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The ASML URS 5000 / 55 B is a stepper. The ASML URS 5000 / 55 B supports 6-inch wafers.[1]
What it is
General reference — not yet source-verifiedThe ASML URS 5000 55 B is a stepper, a type of photolithography system used in semiconductor manufacturing to transfer circuit patterns onto wafer substrates.
How it works
General reference — not yet source-verifiedAs a stepper, the ASML URS 5000 55 B uses a projection lens to image a reticle pattern onto a single die or field at a time. The wafer is then stepped to the next position and exposed again, repeating until the entire wafer is patterned.
Alignment systems in steppers such as the URS 5000 55 B ensure that each exposure layer is precisely registered to previous layers on the wafer.
Where it fits in the process flow
General reference — not yet source-verifiedThe ASML URS 5000 55 B is used in the photolithography stage of wafer fabrication, which occurs after the wafer has been coated with photoresist and before the resist is developed.
Lithography systems like the URS 5000 55 B are typically positioned after wafer cleaning and deposition steps and before etch or ion implantation processes.
Applications
General reference — not yet source-verifiedThe ASML URS 5000 55 B is applied in the fabrication of integrated circuits, where it defines critical device features on silicon wafers.
Steppers of this class are also used in the production of microelectromechanical systems and other semiconductor devices that require photolithographic patterning.
What do the numbers mean?
Wafer handling1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the URS 5000 55 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the URS 5000 55 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the URS 5000 55 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the URS 5000 55 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the URS 5000 55 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the URS 5000 55 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Sep 28, 2026.
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