Bruker
D 8 Fabline
Wafer size
Wafer chuck and standard sample holder
Optics
LynxEye XE[1]
What it is
How it works
The Bruker D 8 Fabline includes motorized slits on the primary side and a fixed 2 mm slit on the primary side, and the instrument supports automated operation with pattern recognition software and automation software.[1]
The Bruker D 8 Fabline has a scanning range from 2θ minimum 28° to maximum 99°, and the Omega motion is limited from 30° to 80° to avoid collision with the 300 mm wafer chuck.[1]
Where it fits in the process flow
General reference — not yet source-verifiedAn X-ray diffractometer sits in the metrology and inspection portion of a semiconductor workflow, where it evaluates materials after deposition, crystallization, or other film-forming steps and before later integration steps that depend on structural quality.
Applications
General reference — not yet source-verifiedAn X-ray diffractometer is used for phase identification, crystal orientation analysis, lattice and strain evaluation, and thin-film characterization in semiconductor and materials work.
What do the numbers mean?
Power & electrical1
- X-ray source
- TXS point focus (50kV 50mA) generator installed in the electronic cabinet behind the tool[1]
Wafer handling4
Optics & imaging3
Control & software3
- Pattern recognition software[1]
Configuration & options5
- Fully automated[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- X-ray sourceTXS point focus (50kV 50mA) generator installed in the electronic cabinet behind the tool[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of instrument is the Bruker D 8 Fabline?
The Bruker D 8 Fabline is an X-ray diffractometer used for metrology and inspection.[1]
What detector does the Bruker D 8 Fabline use?
The Bruker D 8 Fabline uses a LynxEye XE detector.[1]
What wafer size can the Bruker D 8 Fabline handle?
The Bruker D 8 Fabline is equipped with a wafer chuck for 300 mm wafers.[1]
What is the scanning range of the Bruker D 8 Fabline?
The Bruker D 8 Fabline has a two-theta scanning range from 28° to 99°.[1]
What X-ray source does the Bruker D 8 Fabline use?
The Bruker D 8 Fabline uses a TXS point-focus X-ray source with a 50 kV, 50 mA generator.[1]
Not publicly documented
The following facts about the D 8 Fabline are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the D 8 Fabline are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the D 8 Fabline are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the D 8 Fabline are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the D 8 Fabline are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the D 8 Fabline is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 6, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
