Canon
Heatpulse 8800 RTA
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Canon Heatpulse 8800 RTA is a rapid thermal anneal system that processes 8-inch (200 mm) wafers. The equipment is capable of rapid thermal processing, rapid thermal oxidation, and rapid thermal nitridation. The model was originally designed by Ag Associates and later marketed under the Canon brand.[1][3]
Applications
General reference — not yet source-verifiedPrimary applications include dopant activation for source/drain and gate regions, silicide formation (such as titanium or cobalt salicide), and thin oxide growth for gate dielectrics or tunnel oxides. The system can also perform rapid thermal nitridation for gate dielectric nitridation and rapid thermal annealing for memory device fabrication.
What do the numbers mean?
Wafer handling1
Configuration & options1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Canon Heatpulse 8800 RTA support?
The Heatpulse 8800 supports 8-inch (200 mm) wafers.[1]
Not publicly documented
The following facts about the Heatpulse 8800 RTA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Heatpulse 8800 RTA are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Heatpulse 8800 RTA are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Heatpulse 8800 RTA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Heatpulse 8800 RTA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Heatpulse 8800 RTA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]waferpedia.comwaferpedia.com
- [3]Ag Associates Heatpulse 8800 Rta Rtp Rto Rtn System — spwindustrial.comspwindustrial.com
Last updated Sep 27, 2026.
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