CHA
SE 600 High Vacuum E-Beam Evaporation
The CHA SE 600 High Vacuum E-Beam Evaporation System is a deposition tool. The CHA SE 600 High Vacuum E-Beam Evaporation System is configured for 3 in. diameter wafers. The CHA SE 600 High Vacuum E-Beam Evaporation System includes a 19 in. dia. water cooled bell jar.[1][2][3]
What it is
How it works
The CHA SE 600 High Vacuum E-Beam Evaporation System includes a four-pocket E-gun with manual rotation control, an automatic valve sequencer, an Inficon IC6000 crystal deposition rate monitor, and a Temescal CV-8 E-Beam power supply with controls.[1][2]
The CHA SE 600 High Vacuum E-Beam Evaporation System uses a Varian VHS-6 diffusion pump for high vacuum.[1][2]
Where it fits in the process flow
Applications
General reference — not yet source-verifiedThe CHA SE 600 High Vacuum E-Beam Evaporation System is an in-line vacuum deposition tool for wafer processing.
What do the numbers mean?
Power & electrical2
- Temescal CV-8 E-Beam power supply with controls[1]
Vacuum & pumping2
- Varian VHS-6 diffusion pump for high vacuum[1]
Wafer handling3
Performance2
- Inficon IC6000 crystal deposition rate monitor[1]
Control & software2
- Four pocket E-gun with manual rotation control[1]
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size is the CHA SE 600 configured for?
The CHA SE 600 High Vacuum E-Beam Evaporation System is configured for 3 in. diameter wafers.[1][2][3]
What wafer fixturing is installed on the CHA SE 600?
The CHA SE 600 High Vacuum E-Beam Evaporation System uses triple dome planetary fixturing.[1][2]
What rate-monitoring hardware is part of the CHA SE 600 configuration?
The CHA SE 600 High Vacuum E-Beam Evaporation System includes an Inficon IC6000 crystal deposition rate monitor.[1][2]
Not publicly documented
The following facts about the SE 600 High Vacuum E-Beam Evaporation are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SE 600 High Vacuum E-Beam Evaporation are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SE 600 High Vacuum E-Beam Evaporation are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SE 600 High Vacuum E-Beam Evaporation are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SE 600 High Vacuum E-Beam Evaporation are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SE 600 High Vacuum E-Beam Evaporation is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]SE 600 High Vacuum E-Beam Evaporation — CHA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]CHA SE 600 High Vacuum E-Beam Evaporation family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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