Denton Vacuum
Infinity 18
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Denton Infinity 18 is a Denton Vacuum evaporator for deposition applications. The system includes a Telemark 860 deposition controller panel and has a chamber size of 18" x 23" x 36".[1][2]
What it is
How it works
General reference — not yet source-verifiedA deposition controller regulates the tool’s process sequence and operating conditions during film growth.
Where it fits in the process flow
General reference — not yet source-verifiedThe Denton Vacuum Infinity 18 belongs in thin-film deposition after substrate preparation and before later patterning or integration steps.
The Denton Vacuum Infinity 18 supports film formation for processes that require a deposited layer on a prepared wafer, coupon, or other substrate.
Applications
General reference — not yet source-verifiedThe Denton Vacuum Infinity 18 is used for vacuum deposition of thin films.
The Denton Vacuum Infinity 18 is suitable for evaporated coating applications that build functional or protective layers on substrates.
What do the numbers mean?
Power & electrical1
Control & software2
- Telemark 860 deposition controller panel[1]
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage208V, 3Ph, 50/60Hz, 70A[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Infinity 18 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Infinity 18 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Infinity 18 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Infinity 18 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Infinity 18 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Infinity 18 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Infinity 18 — Denton Vacuum | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]Denton Vacuum Infinity 18 family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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