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Disco

DAD3220

Dicing & GrindingDisco DAD3220 family
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DiscoDAD3220
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  • Plate 01DISCO DAD3220 Touch Panel Replacement

    VICPAS TOUCHWatch on YouTube

  • Plate 02Dicing saw. Disco DAD 3220. Blade Replacement.

    Oleksandr DobroliubovWatch on YouTube

Power

1.5 kW[2]

Performance

0.005/160 mm (single error), 0.003/5 mm[2]

Optics

0.00005 mm[2]

What it is

The Disco DAD3220 is an automatic dicing saw used for precision cutting of workpieces in microfabrication and device packaging.[1][2]

How it works

The DAD3220 includes auto-alignment, auto-focus, and auto-kerf check functions, and the model uses an LCD touch panel with a graphical user interface for operation.[2]

The DAD3220 has a 1.5 kW spindle with a shaft lock function for blade changes, and an optional reduced-expansion spindle is available for greater precision during processing.[2]

Where it fits in the process flow

General reference — not yet source-verified

A dicing saw sits in the back-end portion of a fabrication flow after front-end patterning and before die handling, singulation, or package assembly.

Applications

The DAD3220 is used for dicing silicon and other substrates.[4]

The DAD3220 is designed for six-inch workpieces, including a special specification for six-inch square workpieces, and it supports a maximum workpiece size of six inches or one hundred fifty millimeters square under that specification.[2]

  • Programmed dicing of silicon and other substrates

What do the numbers mean?

Power & electrical1

Spindle rated output
1.5 kW[2]
Accurate?

Optics & imaging1

Z-axis moving resolution
0.00005 mm[2]
Accurate?

Performance4

Y-axis positioning accuracy
0.005/160 mm (single error), 0.003/5 mm[2]
Accurate?
Z-axis repeatability accuracy
0.001 mm[2]
Accurate?
Standard functions
Auto-alignment, auto-focus, auto-kerf check[2]
Accurate?
Functions
Auto-alignment, auto-focus, and auto-kerf check[2]
Accurate?

Control & software1

Display
LCD touch panel with graphical user interface[2]
Accurate?

Dimensions & facilities4

Equipment dimensions (W × D × H)
500 × 900 × 1,670 mm[2]
Accurate?
Equipment weight
Approx. 550 kg[2]
Accurate?
Equipment width
500 mm[2]
Accurate?
Equipment dimensions
500 × 900 × 1,670 mm[2]
Accurate?

Configuration & options19

OEM
Disco[1]
Accurate?
Model
DAD3220[1]
Accurate?
Code
SAW3[1]
Accurate?
Location
Sample Prep Room[1]
Accurate?
Max workpiece size
φ6 inch / 150×150 mm (user-specified specification)[2]
Accurate?
X-axis cutting range
160 mm[2]
Accurate?
Cutting speed
0.1 - 500 mm/s[2]
Accurate?
Y-axis cutting range
162 mm[2]
Accurate?
Y-axis index step
0.0001 mm[2]
Accurate?
Z-axis max stroke
32.2 mm (with φ2 inch blades)[2]
Accurate?
θ-axis max rotating angle
320 deg[2]
Accurate?
Spindle rated torque
0.48 N·m[2]
Accurate?
Spindle rotation speed range
3,000 - 40,000 min⁻¹[2]
Accurate?
Spindle lock
Shaft lock function for easier blade changing[2]
Accurate?
Type
Automatic dicing saw[2]
Accurate?
Workpiece size
6-inch / 150 × 150 mm workpieces[2]
Accurate?
Workpiece note
Special specification for 6-inch square workpieces[2]
Accurate?
Spindle count
Single spindle[2]
Accurate?
Spindle rotation speed range
3,000 to 40,000 min−1[2]
Accurate?
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What replaced it?

  • siblingDisco DAD641— Listed on the same equipment page under packaging equipment.source[3]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Spindle rated output1.5 kW[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Is the DAD3220 still in production?

No, the DAD3220 has been discontinued. The successor model is the DAD3221.[2][5]

What is the spindle rotation speed range of the DAD3220?

The spindle rotation speed range is 3,000 to 40,000 revolutions per minute.[2][5][6]

What user interface does the DAD3220 have?

The DAD3220 features an LCD touch panel with a graphical user interface.[2][5][6][7]

What auto functions are included on the DAD3220?

The DAD3220 includes auto-alignment, auto-focus, and auto-kerf check functions.[2][5][6][7]

What material does the DAD3220 typically cut with standard blades?

Standard blades are suitable for cutting silicon.[8]

Not publicly documented

The following facts about the DAD3220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DAD3220 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DAD3220 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DAD3220 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DAD3220 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DAD3220 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
  2. [2]disco.co.jp — disco.co.jpdisco.co.jp
  3. [3]Equipment Page | Utah Nanofab — nanofab.utah.edunanofab.utah.edu
  4. [4]Equipment & Procedures | Shared Materials Instrumentation Facility — smif.pratt.duke.edusmif.pratt.duke.edu
  5. [5]DAD3220 | ダイシングソー | 製品情報 | 株式会社ディスコ — disco.co.jpdisco.co.jp
  6. [6]http://tstvn.com/wp-content/uploads/2021/07/Brochure-DAD3220-_-Dicing-Saws-_-Product-Information-_-DISCO-Corporation.pdf — tstvn.comtstvn.com
  7. [7]DAD3220 | AUROTECH CORPORATION — aurotech.comaurotech.com
  8. [8]DICING SAW - DISCO DAD3220 — Columbia Nano Initiative — cni.columbia.educni.columbia.edu
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Last updated Oct 6, 2026.

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