Edwards
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The Edwards IGX 600L is a dry pump. The IGX 600L has a pumping speed of 365 CFM and an ultimate pressure of 5.25×10⁻⁴ Torr. The IGX 600L is used in applications such as load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch, metal etch, and implant source.[1]
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The following facts about the IGX 600 L are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IGX 600 L are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IGX 600 L are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IGX 600 L are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IGX 600 L are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IGX 600 L is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 26, 2026.