Edwards
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The Edwards iXH1820H is a dry vacuum pump used in semiconductor manufacturing. The pump is part of the iXH series, which is designed for harsh process capability and reliability.[2]
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3.7 × 10⁻³ Torr.[2]
A dry vacuum pump designed for semiconductor applications.[2]
Xcede technology.[2]
Yes, the iXH dry pump range is designed for harsh process capability.[2]
The following facts about the IXH 1820 H are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the IXH 1820 H are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IXH 1820 H are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IXH 1820 H are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IXH 1820 H are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IXH 1820 H are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Last updated Sep 24, 2026.