EV Group
520
Wafer size
Manual wafer load substrate bonder
Power
50 / 60 Hz[1]
Vacuum
High-vacuum capable bond chamber[1]
Performance
± 1,5 %[1]
What it is
How it works
The EVG 520 Bonder includes a high-vacuum capable bond chamber, auto opening of the bond tool cover, a vacuum chuck, top and bottom heaters, a turbo pump and controller, and a roughing pump.[1]
The EVG520 IS uses a proprietary symmetric rapid heating and cooling chuck design and supports fully automated processing with manual loading and unloading.[2]
Where it fits in the process flow
The EVG520 IS is compatible with EVG mechanical and optical aligners and includes an integrated cooling station for higher throughput.[2]
Applications
What do the numbers mean?
Power & electrical5
Vacuum & pumping8
Wafer handling8
- Chuck / alignment systems (EVG520 IS)
- 150 mm heater: EVG 610, EVG 620, EVG 6200; 200 mm heater: EVG 6200, SmartView NT[2]
Optics & imaging1
Performance2
- Cooling (EVG520 IS)
- Integrated cooling station for high throughput; active water cooling top and bottom; integrated cooling optional[2]
Control & software2
- Windows based control software and operation interface[1]
Configuration & options25
- Refurbished[1]
- Capable of fusion & thermal compression bonding[1]
- Capable of anodic bonding[1]
- Auto opening of bond tool cover[1]
- Thermoflex 1400 Chiller (or equivalent)[1]
- Load / unload tool[1]
- Bonding capability (configured system)
- Fusion & thermal compression bonding; anodic bonding[1]
- Automation (EVG520 IS)
- Fully automated processing with manual loading and unloading including external cooling station[2]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EVG520 IS | — | — | Semi-automated wafer bonding system with fully automated processing, manual loading/unloading, external cooling station, and compatibility with EVG mechanical and optical aligners. | evgroup.com[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration50 / 60 Hz[1]
- Configuration120 / 208 V[1]
- Phase3 Phase[1]
- ConfigurationHigh-vacuum capable bond chamber[1]
- Vacuum Chuck6"/150mm diameter chuck[1]
- ConfigurationTurbo pump and controller[1]
- ConfigurationRoughing pump[1]
- Power requirements50 / 60 Hz - 120 / 208 V - 3 Phase[1]
- Bond chamberHigh-vacuum capable bond chamber[1]
- PumpingTurbo pump and controller; roughing pump[1]
- Vacuum standard (EVG520 IS)1E-5 mbar[2]
- Vacuum optional (EVG520 IS)1E-6 mbar[2]
- Anodic bonding power supply (EVG520 IS)Max. voltage: 2 kV; max. current: 50 mA[2]
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 520 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 520 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 520 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 520 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 520 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the 520 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]evgroup.com — evgroup.comevgroup.com
- [3]Equipment inventory listing
- [4]Equipment inventory listing
- [5]Equipment inventory listing
Last updated Oct 11, 2026.
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