EV Group
620 Mask
The EVG 620 is a mask aligner manufactured by EV Group. The EVG 620 supports wafer sizes from 2 to 12 inches. Some configurations of the EVG 620 include backside alignment and infrared alignment.[1]
Wafer size
3 Station Wafer Handler
Power
200 V[2]
Vacuum
6 bar / 87 psi[3]
Performance
Backside Alignment Capability[1]
Optics
620 Mask[2]
What it is
How it works
General reference — not yet source-verifiedMask aligners expose photoresist-coated substrates through a photomask using a UV light source, typically a mercury arc lamp. The system aligns the mask to the substrate using optical microscopes or cameras, then brings them into contact or close proximity for exposure. Alignment can be performed manually, semi-automatically, or automatically depending on the configuration.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Joystick and numeric keypad have been removed
What do the numbers mean?
Power & electrical6
- 50 / 60 Hz[2]
Vacuum & pumping4
Wafer handling5
- 6"; Chuck is 5"[1]
Optics & imaging2
Performance4
Control & software1
- Computer / Controller[1]
Configuration & options12
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Quintel Q 7000 Mask— Same function class: Lithography, UnknownCompare in depthsource[7]
- KLA ICOS CI 8 X 50 Lead— Same function class: Lithography, UnknownCompare in depthsource[8]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What are the electrical requirements for the EVG 620?
The EVG 620 can be configured for 208 V, 1-phase, 50/60 Hz operation with a full load current rating of 7.45 A and power consumption of 1.55 kW. Other configurations may use 200 V, 2-phase, 50/60 Hz with a current rating of 10 A.[2][3]
What compressed air and vacuum levels are needed for the EVG 620?
The EVG 620 requires compressed air (CDA) at 6 bar (87 psi) and vacuum below 850 mbar (6460 torr).[3]
Not publicly documented
The following facts about the 620 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 620 Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 620 Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 620 Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 620 Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 620 Mask are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (10)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]Equipment inventory listing
- [8]Equipment inventory listing
- [9]Equipment inventory listing
- [10]Equipment inventory listing
Last updated Oct 9, 2026.
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