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Filmetrics

F10-PA

Parylene thickness measurement systemFilmetrics F10-PA family
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F10-PA — web.archive.org
Fig. 01F10-PAweb.archive.org[1]

What it is

The Filmetrics F10-PA is a parylene thickness measurement system.[1]

The F10-PA is a thin film metrology instrument for measuring parylene coatings on samples placed on a stage.[1]

How it works

The F10-PA uses optical measurement with a spectrometer and light source unit.[1]

The F10-PA uses AutoBaseline to shorten setup and adjust sensitivity automatically.[1][2]

The F10-PA supports hands-free measurement by placing the sample on the stage.[1][2]

Where it fits in the process flow

The F10-PA measures parylene on transparent and opaque substrates in a production or laboratory setting.[1][2]

Applications

The F10-PA can measure coating thickness and refractive index when upgraded for the wider measurement range feature.[1]

  • Parylene thickness measurements

What do the numbers mean?

Wafer handling1

Substrate compatibility
Measures parylene thickness on transparent and opaque substrates[1]
Accurate?

Optics & imaging1

Software optical constants
Includes optical constants (n and k) for parylene C, N and HT[1]
Accurate?

Control & software5

Software
FILMeasure software[1]
Accurate?
Control software OS support
Software installs on computers running Windows XP, Vista, or Windows 7[1]
Accurate?
Connection
One USB cable needed to connect the system to the computer[1]
Accurate?
Optional accessories
Laptop computer pre-loaded with FILMeasure software[1]
Accurate?
Support features
Free software updates; applications engineers available for immediate 24-hour assistance (Mon-Fri); online 'Hands On' support[1]
Accurate?

Configuration & options4

Measurement purpose
Designed specifically for parylene thickness measurements[1]
Accurate?
Measurement mode
Hands-free measurement mode[1]
Accurate?
AutoBaseline
Proprietary AutoBaseline function that shortens measurement setup and automatically adjusts instrument sensitivity[1]
Accurate?
Included components
Integrated spectrometer/light source unit, sample stage with built-in fiber probe, BK-7 reference material, TS-Hardcoat-3µm thickness standard, hardcopy of operator's manual, connecting cables, spare lamp[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What does the F10-PA measure?

The F10-PA measures parylene coating thickness.[1][2]

Which parylene types are supported?

The F10-PA includes optical constants for parylene C, parylene N, and parylene HT.[1][2]

Can the F10-PA measure on opaque substrates?

The F10-PA can measure parylene thickness on transparent and opaque substrates.[1][2]

How is the sample measured?

The sample is measured by placing it on the stage in hands-free mode.[1][2]

What software and connection are used?

The F10-PA uses FILMeasure software and connects to a computer by USB.[1]

Not publicly documented

The following facts about the F10-PA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F10-PA are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the F10-PA are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the F10-PA are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F10-PA are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F10-PA is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]供应薄膜厚度测量仪F10-PA_电子元器件_维库仪器仪表网 — hi1718.comhi1718.com
  3. [3]��Ĥ��Ȳ�����F10-PA_����/�۸�/���ܲ���/ͼ, ����FILMETRICS��˾_���������� — bio-equip.combio-equip.com
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Last updated Oct 4, 2026.