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Filmetrics

F20-UV

Precision OpticsFilmetrics F20-UV family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The FilMetrics F20-UV is a metrology instrument listed in the optical measurement section of the equipment pages of EPFL's Center of MicroNanoTechnology (CMi). A manufacturer's user manual for the FilMetrics F20-UV is available for download from the CMi equipment page.[1]

FilmetricsF20-UV
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What it is

FilMetrics F20-UV is an optical measurement instrument in the Metrology section of the Center of MicroNanoTechnology CMi at EPFL.[1]

What can it run?

Process applications and technology nodes documented for this tool.

  • Optical measurement

What do the numbers mean?

Optics & imaging3

Equipment section
Metrology > Optical measurement[1]
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Instrument classification (facility listing)
Metrology — Optical measurement[1]
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Facility category
Metrology / Optical measurement[1]
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Configuration & options5

OEM
Filmetrics[1]
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Model
F20-UV[1]
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Documentation
Manufacturer's user manual available for download via the CMi equipment page[1]
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Manufacturer
Filmetrics[1]
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Documentation
Manufacturer's user manual available for download[1]
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What replaced it?

  • siblingNanospec AFT-6100— Listed in the same optical measurement section of the EPFL CMi equipment portfolio as the Nanospec AFT-6100.source[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Where is the F20-UV installed and operated?

The instrument is part of the metrology equipment at the Center of MicroNanoTechnology (CMi), a research facility at EPFL.[1]

Not publicly documented

The following facts about the F20-UV are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F20-UV are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the F20-UV are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the F20-UV are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F20-UV are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F20-UV is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]epfl.ch — epfl.chepfl.ch
  2. [2]filmetrics.com — filmetrics.com (Jul 1, 2017)web.archive.org
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Last updated Sep 30, 2026.

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