Filmetrics
F54-XY-200
Plate 01The Filmetrics® F54-XY Automated Thin Film Thickness Mapping System
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What it is
How it works
The F54-XY-200 measures thin-film properties by collecting reflected light over a range of wavelengths and comparing the measured reflectance spectrum with calculated reflectance spectra.[2]
The F54-XY-200 uses mapping software to define measurement recipes, acquire data at selected positions, and display thickness results on wafer maps.[2]
Where it fits in the process flow
The F54-XY-200 is used for measurement of dielectrics, semiconductors, and thin metal films.[2]
Applications
The F54-XY-200 measures oxides, nitrides, resists, polysilicon, optical coatings, flat panel display films, and related thin-film stacks.[2]
The F54-XY-200 can measure optical constants on dielectric films.[2]
The F54-XY-200 supports mono-layer, bi-layer, and tri-layer stack measurements.[1][2]
- Thickness measurement
- Thickness mapping
- Mono-, bi-layer, and tri-layer stack measurements
What do the numbers mean?
Optics & imaging7
- Optical constants measurement
- n and k can also be measured on a variety of dielectric films[2]
Control & software1
Configuration & options7
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What materials can the F54-XY-200 measure?
The F54-XY-200 is used to measure dielectrics, semiconductors, and thin metal films.[2]
What film types are commonly measured with the F54-XY-200?
The F54-XY-200 commonly measures oxides, nitrides, resists, polysilicon, optical coatings, flat panel display films, and coatings used in CD and DVD manufacture.[2]
Can the F54-XY-200 measure optical constants?
The F54-XY-200 can measure optical constants on a variety of dielectric films.[2]
What stack configurations are supported?
The F54-XY-200 supports mono-layer, bi-layer, and tri-layer stack measurements.[1][2]
What kind of films are not suitable for measurement?
The F54-XY-200 cannot measure very rough films and opaque dielectric films.[2]
Not publicly documented
The following facts about the F54-XY-200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F54-XY-200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the F54-XY-200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F54-XY-200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F54-XY-200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F54-XY-200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Last updated Oct 3, 2026.