Hitachi

8840

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The Hitachi CD-SEM S-8840 is a critical dimension scanning electron microscope used for semiconductor wafer measurement. The Hitachi CD-SEM S-8840 offers a CD measurement range of 0.1 to 10 μm and a secondary electron image resolution of 5 nm. The Hitachi CD-SEM S-8840 achieves a throughput of 26 wafers per hour.^[1]

8840 — Inventory photo — Fig. 018840Inventory photo^[2]

Power

500 to 1300 V (variable in 10 V steps)^[1]

Vacuum

360 x 640 x 520 mm, 30 kg each (option)^[1]

Performance

1 unit^[3]

Optics

5 nm (50 Å) at 0.8 kV^[1]

What it is

The Hitachi 8840 is a Hitachi semiconductor inspection instrument.^[2]

What do the numbers mean?

Power & electrical3

Accelerating voltage: 500 to 1300 V (variable in 10 V steps)^[1]
Power supply dimensions: 535 x 600 x 1500 mm, 200 kg^[1]
Power requirement: Single Phase, 100V^[3]

Vacuum & pumping3

Vacuum system: Ion pump (3 units), turbo molecular pump (2 units), optional rotary pump (2 units)^[1]
Rotary pump dimensions: 360 x 640 x 520 mm, 30 kg each (option)^[1]
Turbo controller: Included^[3]

Wafer handling2

Wafer size: 8-inch or 6-inch^[1]
Throughput: 26 wafers/hour (continuous measurement, 1 point/chip, 5 chips/wafer)^[1]

Optics & imaging7

Secondary electron image resolution: 5 nm (50 Å) at 0.8 kV^[1]
Magnification: x1000 to x150,000 (SEM), about x110 (optical)^[1]
Lens system: Electromagnetic condenser lens system, FCM objective lens^[1]
Objective lens aperture: Heating type movable aperture, 4 openings selectable outside column^[1]
Optical microscope field: 1.2 mm square, monochrome image^[1]
File storage: 3.5-inch floppy disk drive, 3.5-inch magneto-optic disk drive^[1]
Main column dimensions: 1170 x 1890 x 1650 mm, 1100 kg^[1]

Performance1

Lamp for alignment: 1 unit^[3]

Control & software2

Display: 20-inch monitor, EWS (GUI), interactive computer operation^[1]
Scanning modes: TV scan, raster rotation, auto brightness/contrast control^[1]

Dimensions & facilities1

Display unit dimensions: 600 x 1331 x 1800 mm, 320 kg^[1]

Configuration & options12

CD measurement range: 0.1 to 10 μm^[1]
CD measurement reproducibility: ±1% or 0.005 μm (3 sigma), whichever larger^[1]
Stage movement range: X and Y: 0 to 200 mm^[1]
Stage drive: Pulse motor^[1]
Stage max speed: 50 mm/s^[1]
Electron gun: Schottky emission type^[1]
Secondary electron detection: 2-stage detection system^[1]
Scanning coil: 2-stage deflection^[1]
Stigmator coil: 8-pole electromagnetic type (X, Y)^[1]
Probe current monitoring: Faraday cup incorporated with automatic measurement function^[1]
Data processing: Average value, standard deviation, maximum/minimum values^[1]
Printer: 80-character thermal printer^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Accelerating voltage500 to 1300 V (variable in 10 V steps)^[1]
Vacuum systemIon pump (3 units), turbo molecular pump (2 units), optional rotary pump (2 units)^[1]
Power supply dimensions535 x 600 x 1500 mm, 200 kg^[1]
Rotary pump dimensions360 x 640 x 520 mm, 30 kg each (option)^[1]
Power requirementSingle Phase, 100V^[3]
Turbo controllerIncluded^[3]

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Not publicly documented

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Not publicly documented

The following facts about the 8840 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8840 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 8840 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 8840 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 8840 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 8840 is not on record.
Answerable by: an OEM datasheet or a fab qualification report