Hitachi
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Plate 01Hitachi S-4800 and SU8030 FE-SEM Instructional Video - Northwestern University
Plate 02MRL Hitachi S 4800 Basic Training Video
Plate 03Part 2-Hitachi S-4800 Scanning electron Microscope (SEM)
Plate 04Hitachi S-4800 SEM sample insertion
Plate 05Hitachi S-4800 SEM beam alignment
Plate 06Introduction to the SEM - Scanning Electron Microscope - Hitachi S-4800 - Part 1
The Hitachi S-4800 is a high-resolution field-emission scanning electron microscope (FESEM) that uses a cold field-emission electron source. The instrument is capable of imaging and compositional analysis and is routinely equipped with a STEM detector and an energy-dispersive X-ray spectroscopy (EDS or EDX) detector.[3][1]
The cold field-emission source requires an ultra-high vacuum and operates at room temperature without thermal assistance, providing a stable beam with a narrow energy spread. Beam focusing and astigmatism correction are controlled by condenser and objective lenses, with an objective aperture that trades beam current for resolution and depth of field.
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
No research found yet — worked with this tool? Share what you know.
The Hitachi S-4800 uses a cold field-emission electron source.[1]
The Hitachi S-4800 can be equipped with a scanning transmission electron microscopy (STEM) detector and an energy-dispersive X-ray spectroscopy (EDX) detector.[1]
The following facts about the S-4800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S-4800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S-4800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S-4800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S-4800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S-4800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Last updated Oct 3, 2026.
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.