Waferpedia

JDSU

Off-Axis Green

JDSU Off-Axis family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

JDSUOff-Axis Green
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What it is

The laser is compatible with ASML PAS 5500 photolithography systems.[1][2]

Where it fits in the process flow

The JDSU Off-Axis Green laser is a component of the alignment system in an ASML PAS 5500 lithography tool.[1][2]

What do the numbers mean?

Configuration & options3

Compatible with ASML PAS 5500 Part Number: SERV 455 09864[1]
Accurate?
Compatibility
ASML PAS 5500[1]
Accurate?
Part Number
SERV 455 09864[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Which photolithography tool is this laser compatible with?

The JDSU Off-Axis Green laser is compatible with the ASML PAS 5500 series.[1][2]

What is the part number for this laser?

The part number is SERV 455 09864.[1][2]

Not publicly documented

The following facts about the Off-Axis Green are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Off-Axis Green are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Off-Axis Green are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Off-Axis Green are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Off-Axis Green are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Off-Axis Green is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Off-Axis Green — JDSU | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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