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Keysight

4072 A Parametric

Test & ProbeKeysight 4072 A Parametric family
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Keysight4072 A Parametric
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Power

integrated pulse generator control[2]

Optics

2 µV, 1 fA[2]

What it is

The Keysight 4072 A is a semiconductor parametric tester, also referred to as an advanced parametric tester.[1][2]

How it works

The 4072 A supports up to two high-power SMUs (HPSMU), up to two high-resolution SMUs (HRSMU), and up to eight total SMUs.[2]

The system includes a low-leakage switching matrix configurable from twelve to forty-eight fully-guarded Kelvin outputs, and a high-frequency switching matrix with integrated pulse generator control.[2]

Where it fits in the process flow

General reference — not yet source-verified

Parametric testers are used in semiconductor manufacturing to perform electrical testing on test structures embedded in the wafer scribe lines, providing data on process parameters after front-end-of-line (FEOL) or back-end-of-line (BEOL) processing.

Applications

The 4072 A performs direct-current (DC) measurements, capacitance measurements, flash memory cell testing, and testing of other high-frequency applications.[2]

Measurement capabilities of the 4072 A include two microvolt and one femtoamp resolution on the HRSMU, plus-minus two hundred volts and plus-minus one amp output on the HPSMU, and a one kilohertz to two megahertz capacitance frequency measurement range on the HSCMU.[2]

What do the numbers mean?

Power & electrical4

High-frequency switching matrix
integrated pulse generator control[2]
Accurate?
HPSMU output capability
±200 V, ±1 A[2]
Accurate?
Capacitance frequency range
1 kHz to 2 MHz[2]
Accurate?
HV-SPGU output voltage
±40 V (80 V p-p) at high impedance[2]
Accurate?

Wafer handling1

Wafer size
8 inch[1]
Accurate?

Optics & imaging1

HRSMU measurement resolution
2 µV, 1 fA[2]
Accurate?

Configuration & options7

SMU support
up to 2 HPSMU, up to 2 HRSMU, up to 8 total SMUs[2]
Accurate?
Switching matrix
low-leakage, customizable from 12 to 48 fully-guarded Kelvin outputs[2]
Accurate?
Auxiliary inputs / Extended path inputs
8 auxiliary inputs, 48 extended path inputs[2]
Accurate?
Ground unit current
±1.6 A[2]
Accurate?
HV-SPGU pulse rise/fall time
as fast as 20 ns[2]
Accurate?
HV-SPGU three-level output pulse
provides three-level output pulse capability[2]
Accurate?
HV-SPGU arbitrary linear waveform generation
ALWG function[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • High-frequency switching matrixintegrated pulse generator control[2]
  • HPSMU output capability±200 V, ±1 A[2]
  • Capacitance frequency range1 kHz to 2 MHz[2]
  • HV-SPGU output voltage±40 V (80 V p-p) at high impedance[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 4072 A Parametric are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4072 A Parametric are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 4072 A Parametric are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 4072 A Parametric are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 4072 A Parametric are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 4072 A Parametric is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]parametrictestsolutions.com — parametrictestsolutions.comparametrictestsolutions.com
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Last updated Sep 24, 2026.

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