KLA
Candela CS 20 V
What it is
General reference — not yet source-verifiedThe KLA Candela CS 20 V is a surface inspection system used in semiconductor manufacturing for detecting defects on unpatterned wafers. The system belongs to KLA's Candela product family, which is designed for high-sensitivity inspection of wafer surfaces.
How it works
The KLA Candela CS 20 V employs a 405 nm oblique-incidence laser and a 660 nm normal-incidence laser for defect detection. The system runs Candela Wafer software version 6.8 Build 16.[3]
Where it fits in the process flow
General reference — not yet source-verifiedThe KLA Candela CS 20 V is used for inline surface inspection after critical planarization steps such as chemical mechanical polishing (CMP). The system is also employed for incoming wafer inspection and for monitoring substrate quality during wafer manufacturing. Inspection results provide feedback to upstream deposition, etching, and polishing processes.
Applications
General reference — not yet source-verifiedThe KLA Candela CS 20 V is applied to the detection of surface defects such as scratches, pits, particles, and residues on bare silicon wafers and epitaxial wafers. The system is also used for inspecting other substrates, including sapphire and GaAs, in compound semiconductor manufacturing.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Candela CS 20 V are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela CS 20 V are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Candela CS 20 V are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Candela CS 20 V are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela CS 20 V are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela CS 20 V is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]Equipment inventory listing
Last updated Oct 1, 2026.
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