KLA

F 50 Thin Film Thickness Mapper

Research Quality: 40% complete

The KLA / Filmetrics F 50 is a thin film thickness mapper used for measuring thin film thickness on semiconductor wafers. The F 50 covers a spectral range of 378.90 nm to 1050.80 nm.^[1]

F 50 Thin Film Thickness Mapper — Inventory photo — Fig. 01F 50 Thin Film Thickness MapperInventory photo^[1]

What it is

The KLA / Filmetrics F 50 is a thin film thickness mapper.^[2]^[1]^[3]

What do the numbers mean?

Optics & imaging7

Beginning / Ending nm: 378.90 / 1050.80^[1]
Spectral Range Start: 378.90 nm^[1]
Spectral Range End: 1050.80 nm^[1]
Spectral range (beginning nm): 378.90^[1]
Spectral range (ending nm): 1050.80^[1]
Wavelength Range: 378.90 to 1050.80 nm^[1]
Wavelength range: 378.90 nm - 1050.80 nm^[1]

Control & software1

Software version: 9.6.9.0^[1]

Configuration & options12

Model 205-0881^[1]
Integration Time at 3000 Counts on: Si 3.1 ms^[1]
Manufacturer: KLA / Filmetrics^[2]
Model: F 50^[2]
Sub-model: 205-0881^[1]
Integration Time: 3.1 ms at 3000 counts on Si^[1]
Model number variant: 205-0881^[1]
Integration time at 3000 counts on Si: 3.1 ms^[1]
OEM / Make: KLA / Filmetrics^[1]
Product Type: Thin Film Thickness Mapper^[1]
Listed Model Designation: 205-0881^[1]
Model designation: 205-0881^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
205-0881	—	—	—	Equipment inventory listing^[1]

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Not publicly documented

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Frequently asked questions

What model is this equipment?

The equipment is the KLA / Filmetrics F 50 Thin Film Thickness Mapper.^[2]^[1]^[3]

What is the equipment type?

The equipment is a thin film thickness mapper.^[2]^[1]^[3]

Not publicly documented

The following facts about the F 50 Thin Film Thickness Mapper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F 50 Thin Film Thickness Mapper are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the F 50 Thin Film Thickness Mapper are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F 50 Thin Film Thickness Mapper are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F 50 Thin Film Thickness Mapper is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F 50 Thin Film Thickness Mapper are on record.
Answerable by: an OEM parts catalog or a service engineer