KLA
P 22 Surface
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The KLA P 22 Surface is a surface profilometer used in metrology and inspection.[3]
The KLA P 22 Surface is part of the KLA P family.[3]
How it works
General reference — not yet source-verifiedA surface profilometer measures surface topography by sensing height variation across a part or wafer surface.
Surface profilometers are used to characterize step height, roughness, flatness, and other surface features that matter in process control.
Where it fits in the process flow
General reference — not yet source-verifiedSurface profiling is commonly used to verify process outcomes after fabrication steps and before later processing depends on dimensional accuracy.
Applications
General reference — not yet source-verifiedSurface profilometers are generally used for process monitoring, defect-related surface review, and dimensional verification on manufactured surfaces.
What do the numbers mean?
Configuration & options5
- UPI Board Only[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the P 22 Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 22 Surface are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P 22 Surface are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P 22 Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P 22 Surface are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P 22 Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (8)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]Equipment inventory listing
- [5]KLA 2135 vs KLA P 22 Surface comparison | Waferpedia — waferpedia.comwaferpedia.com
- [6]KLA P 16 + vs KLA P 22 Surface comparison | Waferpedia — waferpedia.comwaferpedia.com
- [7]KLA P 22 Surface vs KLA Surfscan SP 5 Particle Defect comparison | Waferpedia — waferpedia.comwaferpedia.com
- [8]KLA P 22 Surface vs KLA Solid State comparison | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 9, 2026.
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