KLA
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The KLA Puma 9120 is a dark-field defect detection tool. The KLA Puma 9120 is set up for 200 mm or 300 mm wafers. The KLA Puma 9120 has two cameras.[1][2]
The Puma 9120 uses a dual open-cassette loader for two hundred millimeter and three hundred millimeter wafers. The system is equipped with two cameras. Three inspection pixel models are installed or available, designated as sL5, sL8, and sL20. The smallest pixel size available is zero point sixteen micrometers. Software options include an array mode algorithm, a sizing option, and a nine-point-one simulator. The tool does not support RICO.[1][3][2]
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The KLA Puma 9120 supports two hundred millimeter and three hundred millimeter wafers.[4][1][3][2]
Available pixel sizes are sL5, sL8, and sL20. The smallest pixel size is zero point sixteen micrometers.[1][3][2]
Yes, the tool has an array mode algorithm software option.[1][2]
The system uses visible and ultraviolet light in the 370 to 720 nanometer range.[3]
The following facts about the Puma 9120 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Puma 9120 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Puma 9120 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Puma 9120 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Puma 9120 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Puma 9120 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 3, 2026.