Lam Research
2300 Kiyo GX RIE
What it is
The Lam 2300 Kiyo GX is a reactive-ion etcher (RIE) used for semiconductor fabrication. The 2300 Kiyo GX is configured for polysilicon etching. The system includes a Corvus Tx configuration with six channels. The 2300 Kiyo GX has four FOUP ports. The turbo pump is an Edwards STP-iXA3306CV. The system uses six ATS MPX-45FN chiller units and six Step Science SCS-9.75EWSVD01ML chiller units.[1][2]
What do the numbers mean?
Vacuum & pumping2
- Film Type: Polysilicon - FOUP Ports: 4 - Turbo Pump: Edwards / STP-iXA3306CV - Chiller Unit: ATS / MPX-45FN / 6 units[2]
Configuration & options11
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of turbo pump is used in the Lam 2300 Kiyo GX?
Not publicly documented
The following facts about the 2300 Kiyo GX RIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 Kiyo GX RIE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 Kiyo GX RIE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 Kiyo GX RIE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 Kiyo GX RIE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2300 Kiyo GX RIE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Oct 11, 2026.
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