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Lam Research

Concept Two Sequel

DepositionLam Research Concept Two family
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Concept Two Sequel — Inventory photo
Fig. 01Concept Two SequelInventory photo[1]

What it is

The Lam / Novellus Concept Two Sequel is a plasma-enhanced chemical vapor deposition system.[1][5][6]

The Concept Two Sequel is configured for 8 inch wafers.[1][5][6]

How it works

General reference — not yet source-verified

A plasma-enhanced chemical vapor deposition system uses plasma to drive chemical reactions from process gases and form thin films on wafer surfaces.

A deposition tool of this class typically processes wafers in a chambered vacuum environment with gas delivery, plasma generation, and wafer handling hardware.

Where it fits in the process flow

General reference — not yet source-verified

The Concept Two Sequel belongs in the thin film deposition portion of semiconductor fabrication.

A deposition tool of this class is used after earlier surface preparation and before later patterning or integration steps that rely on the deposited film.

Applications

The Concept Two Sequel is a thin film deposition system for semiconductor manufacturing.[1]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Pressure gauge missing / faulty parts
  • Ebara AA 40 W-H (2)
  • Ebara 150 WT (2)
  • GS4 Burnbox
  • Missing transfer module pump, loadlock pump, process chamber pump, and abatement system

What do the numbers mean?

Vacuum & pumping2

Pressure Gauge[1]
Accurate?
Missing Transfer Module Pump, Loadlock Pump, Process Chamber Pump, & Abatement System[1]
Accurate?

Wafer handling5

Mag 7 Transfer Module Robot[1]
Accurate?
Loadlock Slit Valve Actuator
SMC[1]
Accurate?
Loadlock Indexer Controller
Animatics CC Model CDP 2407 2[1]
Accurate?
Wafer Size
8 inch[1]
Accurate?
Transfer Module Robot
Mag 7[1]
Accurate?

Gas & chemistry1

Process
PECVD (Plasma-Enhanced Chemical Vapor Deposition)[1]
Accurate?

Control & software6

Software Version
4.92 B 15[1]
Accurate?
Factory Interface
SMIF (2)[1]
Accurate?
Input & Output Controller
IOC O, IOC2, IOC3[1]
Accurate?
TV Controller
Millipore[1]
Accurate?
Operating System
QNX OS Version 4.23 A[1]
Accurate?
CIM Interface
SECS[1]
Accurate?

Configuration & options18

Thin Film[1]
Accurate?
CIM
SECS[1]
Accurate?
Process
SRO MIM[1]
Accurate?
QNX OS Version
4.23 A[1]
Accurate?
Chamber Type
A (C2-CV0D-S) / B (C2-CVDD-S)[1]
Accurate?
SMIF
LPI 2200[1]
Accurate?
Cool Station (4)[1]
Accurate?
Missing / Faulty Parts:[1]
Accurate?
Ebara AA 40 W-H (2)[1]
Accurate?
Ebara 150 WT (2)[1]
Accurate?
GS4 Burnbox[1]
Accurate?
Chamber Type A
C2-CV0D-S[1]
Accurate?
Chamber Type B
C2-CVDD-S[1]
Accurate?
SMIF Load Port
LPI 2200[1]
Accurate?
Cool Station Count
4[1]
Accurate?
Vintage Year
2000[1]
Accurate?
OEM
Lam / Novellus[1]
Accurate?
Model
Concept Two Sequel[1]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationPressure Gauge[1]
  • ConfigurationMissing Transfer Module Pump, Loadlock Pump, Process Chamber Pump, & Abatement System[1]
  • ProcessPECVD (Plasma-Enhanced Chemical Vapor Deposition)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What host communication interface does the system support?

The system is equipped with a SECS/GEM interface for communication with factory host systems.[1]

Not publicly documented

The following facts about the Concept Two Sequel are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Concept Two Sequel are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Concept Two Sequel are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Concept Two Sequel are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Concept Two Sequel is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Concept Two Sequel are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
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Last updated Oct 1, 2026.

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