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Lam Research

Gasonics Iridia 4800 DL Asher / Stripper

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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Lam Research Gasonics Iridia 4800 DL is an asher and stripper for semiconductor manufacturing. The model designation is Iridia 4800 DL.[1][2][3]

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[1]
Accurate?

Configuration & options5

Make
Lam / Novellus / Gasonics[1]
Accurate?
Model
Iridia 4800 DL[1]
Accurate?
Equipment type
Asher / Stripper[1]
Accurate?
Vintage
1998[1]
Accurate?
Manufacturer
Lam / Novellus / Gasonics[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the model designation?

The model designation is Iridia 4800 DL.[1][2][3]

What type of tool is it?

The tool is an asher and stripper.[1][2][3]

Not publicly documented

The following facts about the Gasonics Iridia 4800 DL Asher / Stripper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics Iridia 4800 DL Asher / Stripper are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Gasonics Iridia 4800 DL Asher / Stripper are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Gasonics Iridia 4800 DL Asher / Stripper are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Gasonics Iridia 4800 DL Asher / Stripper are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Gasonics Iridia 4800 DL Asher / Stripper is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
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Last updated Oct 7, 2026.

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