Laurell
EDC-HL-15 B
The Laurell EDC-HL-15 B is an EDC™ System spin coater. The Laurell EDC-HL-15 B is in the 650-series. The Laurell EDC-HL-15 B has a maximum substrate size of 300mm (9" x 9") and a maximum speed of 12000 rpm.[1]
What it is
The Laurell EDC-HL-15 B is a spin coater in the EDC System 650-series.[1]
How it works
The EDC-HL-15 B supports tabletop, in-deck, and on-deck mounting options.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThe EDC-HL-15 B fits in coating steps that occur before pattern exposure, lithographic pattern transfer, or other surface-processing operations that require a controlled thin film.
The EDC-HL-15 B fits in process flows where a substrate must be coated with a resist or similar liquid film before later development, curing, or downstream patterning.
Applications
General reference — not yet source-verifiedThe EDC-HL-15 B is used for resist processing on substrates used in microfabrication and related surface-processing work.
What do the numbers mean?
Wafer handling1
Control & software1
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the EDC-HL-15 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-HL-15 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EDC-HL-15 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EDC-HL-15 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EDC-HL-15 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EDC-HL-15 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
Last updated Oct 7, 2026.
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The Laurell H6-15 B is a spin coater in the 650-series. The Laurell H6-15 B supports a maximum substrate size of 300mm (9" x 9") and a maximum speed of 12000 rpm.
The Laurell WS-650-15 B is a 650-series spin coater for resist processing that accommodates up to 300mm wafers and reaches 12,000 RPM.
The Laurell WS-650-15B is a spin coater in the 650 Series.
