Laurell
WS-650-23 B
The Laurell WS-650-23 B is a spin coater in the 650-series. The Laurell WS-650-23 B has a maximum substrate size of ø 150mm (5" x 5"). The Laurell WS-650-23 B has a maximum speed of 12000 rpm.[1]
What it is
The Laurell WS-650-23 B is a spin coater for resist processing.[1]
How it works
General reference — not yet source-verifiedA spin coater spreads a liquid film on a flat substrate by rotating the substrate at high speed. The rotating motion drives fluid outward and leaves a thinner coating on the surface. A mask aligner is not part of this equipment class.
A resist-processing spin coater is used with liquid resists and similar coating materials before subsequent exposure or curing steps. The machine class is built around a rotating chuck or support that holds the substrate during coating.
Where it fits in the process flow
General reference — not yet source-verifiedThe WS-650-23 B fits in front-end resist coating steps in a lithography flow. The WS-650-23 B is used before later pattern-definition steps that follow application of the resist film.
The WS-650-23 B is used after a substrate is prepared for coating and before downstream exposure, baking, or development steps. The WS-650-23 B supports resist film preparation on flat substrates used in microfabrication and related processes.
Applications
General reference — not yet source-verifiedThe WS-650-23 B is used for spin-coating photoresist and other liquid process films on flat substrates.
The WS-650-23 B is suitable for laboratory and production-style resist-processing workflows that require controlled thin-film coating on small wafers or similarly sized substrates.
What do the numbers mean?
Wafer handling2
Control & software1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the WS-650-23 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-23 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the WS-650-23 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WS-650-23 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WS-650-23 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WS-650-23 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
Last updated Oct 8, 2026.
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