Leybold
CCS pro AR
The Leybold CCS pro AR is a deposition coater. The Leybold CCS pro AR uses a 3-phase, 400 V AC, 50 Hz, 20 KVA power supply. The Leybold CCS pro AR includes a Leybold D65B mechanical pump and a turbomolecular high vacuum pump.[1][2]
What it is
The Leybold CCS pro AR is a deposition coater.[2]
How it works
General reference — not yet source-verifiedA coater in this class deposits thin films onto substrates by placing the substrate in a vacuum environment and using an evaporation or sputtering process to build a coating layer.
A deposition coater is typically built around a vacuum chamber, pumping hardware, source hardware, and tooling that positions the workpiece during coating.
Where it fits in the process flow
General reference — not yet source-verifiedA deposition coater belongs in the thin-film process flow after substrate preparation and before later patterning or assembly steps.
A deposition coater is used when a process requires a controlled film on a part before downstream lithography, etch, inspection, or packaging operations.
Applications
General reference — not yet source-verifiedA deposition coater is used for applying functional thin films to substrates in semiconductor and related precision manufacturing.
A deposition coater is used for optical, protective, conductive, and barrier coatings when a controlled deposited layer is needed.
What do the numbers mean?
Power & electrical3
Vacuum & pumping4
Configuration & options20
- 1x HPE6 Egun with 7 pockets[1]
- 1x MkI ion source[1]
- Dome tooling[1]
- Polycold[1]
- 2 domes[1]
- 2 sets of drop rings[1]
- 1 dome holder for loading[1]
- Spare set of shields[1]
- Hard copies of manuals and documentation[1]
- Fully refurbished[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the CCS pro AR are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CCS pro AR are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CCS pro AR are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CCS pro AR are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CCS pro AR are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CCS pro AR is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]CCS pro AR — Leybold | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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