Leybold
IBS 1400 HT GT Dual Ion Beam
The Leybold IBS 1400 HT GT is a dual ion beam sputtering system for deposition. The IBS 1400 HT GT includes a 4-position target tower with 3 target positions (optional 4th target). The IBS 1400 HT GT has a main KRI sputter source and an additional KRI assist source.[1][2]
What it is
The Leybold IBS 1400 HT GT Dual Ion Beam is a dual ion beam sputtering system for deposition.[1][2]
The IBS 1400 HT GT includes a four-position target tower with three target positions and an optional fourth target, a main KRI sputter source, an additional KRI assist source, an OMS5100i direct optical monitor, a planetary substrate carrier, a ceramic plate substrate heater, and front and rear doors.[1][2]
How it works
Where it fits in the process flow
Applications
What do the numbers mean?
Wafer handling6
- 4 x 35 0mm planetary substrate carrier (2 x 530 mm planets can also be installed)[1]
- Two test glasses (with shutter) on the substrate carrier for complex process monitoring schemes[1]
- Ceramic plate substrate heater[1]
- Substrate carrier
- 4 x 350mm planetary substrate carrier (2 x 530 mm planets can also be installed)[2]
- Test glasses
- Two test glasses (with shutter) on the substrate carrier for complex process monitoring schemes[2]
Optics & imaging2
- OMS5100i direct optical monitor (as installed in the HELIOS)[1]
Configuration & options8
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What type of ion sources does the Leybold IBS 1400 HT GT use?
The system uses KRI sputter and assist sources.[1]
What substrate carrier options are available?
The system has a four-position planetary substrate carrier with 350 mm positions. Two 530 mm planets can also be installed.[1]
Does the system include optical monitoring?
Yes, it includes an OMS5100i direct optical monitor.[1]
Does the system have substrate heating?
Yes, it includes a ceramic plate substrate heater.[1]
Not publicly documented
The following facts about the IBS 1400 HT GT Dual Ion Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IBS 1400 HT GT Dual Ion Beam are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IBS 1400 HT GT Dual Ion Beam are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IBS 1400 HT GT Dual Ion Beam are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IBS 1400 HT GT Dual Ion Beam are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IBS 1400 HT GT Dual Ion Beam is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 13, 2026.
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