Mattson
AST 280 RTP
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Mattson AST 280 RTP is a rapid thermal processing (RTP) system. The Mattson AST 280 RTP is categorized under thermal/diffusion equipment.[1][2]
What it is
The Mattson AST 280 is a rapid thermal processing (RTP) system.[1][2]
How it works
General reference — not yet source-verifiedRapid thermal processing systems heat wafers using high-intensity radiation sources, typically tungsten-halogen lamps or arc lamps, arranged around the wafer in a reflective chamber.
Temperature is controlled by closed-loop feedback from pyrometers or thermocouples, allowing ramp rates of tens to hundreds of degrees Celsius per second.
Where it fits in the process flow
General reference — not yet source-verifiedRTP tools are typically positioned in the fab after ion implantation processes for dopant activation, after deposition for silicide formation, or before epitaxy for surface preparation.
Applications
General reference — not yet source-verifiedAdditional applications include silicidation, contact alloying, and thin-film densification.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the AST 280 RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the AST 280 RTP are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AST 280 RTP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AST 280 RTP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AST 280 RTP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AST 280 RTP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]AST 280 RTP — Mattson | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 27, 2026.
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