MKS
The MKS CM12P1 is a compact remote plasma source for ALD, CVD, and PVD chambers. The CM12P1 delivers 12 kW output power with ±1% power set point accuracy. The CM12P1 supports EtherCAT or Analog DB25 communication.[1]
MKS manufactures its diaphragm gauges using nickel-based alloys such as Inconel® and Incoloy®, which are selected for corrosion resistance when matched to the process chemistry.[1]
The sensors are fully welded and 100% leak-checked before assembly, and in the event of a rare diaphragm failure, the process gases are completely contained within the sensor.[1]
Process applications and technology nodes documented for this tool.
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The CM12P1 is part of MKS's Baratron® capacitance manometer line, which measures absolute gas pressure using a metal diaphragm sensor.[1]
The diaphragm gauges are made almost exclusively using nickel-based alloys such as Inconel® and Incoloy®, which provide corrosion resistance when matched to the process.[1]
The sensors are fully welded and 100% leak-checked prior to assembly.[1]
In the event of an extremely rare failure of the diaphragm, the process gases are completely contained within the sensor, preventing escape to the outside environment.[1]
The following facts about the CM12P1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CM12P1 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CM12P1 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CM12P1 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CM12P1 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CM12P1 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 22, 2026.