Nikon
NES 1 H 04 Mini
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedA lithography stepper is a wafer-fabrication exposure tool used to transfer circuit patterns from a reticle or mask onto a photosensitive layer on the wafer. A stepper belongs in the front end of semiconductor patterning flow, where patterned exposure defines features before later development and etch steps.
How it works
General reference — not yet source-verifiedA lithography stepper projects a patterned image onto selected areas of a coated wafer through an optical system. A mask aligner or stepper class machine uses light exposure to create the latent pattern in photoresist for later processing.
Where it fits in the process flow
General reference — not yet source-verifiedLithography sits after wafer preparation and resist coating. Lithography sits before resist development, pattern transfer, and subsequent fabrication steps such as etching or deposition that follow the exposed resist image.
Applications
What do the numbers mean?
No specifications recorded yet
Be the first to add cited specifications for this tool.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the NES 1 H 04 Mini are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the NES 1 H 04 Mini are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NES 1 H 04 Mini are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NES 1 H 04 Mini are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NES 1 H 04 Mini are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NES 1 H 04 Mini are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]NES 1 H 04 Mini — Nikon | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
Compare with similar tools
View all →Brooks 017-0146-01 is a prealigner manufactured by Brooks.
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.
