Onto Innovation

MP 300 Metal Film Thickness

Metrology & Inspection Onto Innovation MP 300 family

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Provisional entry — research in progress

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The MP 300 Metal Film Thickness Measurement is a metrology and inspection tool from Onto Innovation. The MP 300 is designed for measuring metal film thickness on wafers. The MP 300 supports wafer sizes of 4, 6, 8, and 12 inches.^[1]^[2]^[3]

Onto InnovationMP 300 Metal Film Thickness

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What it is

General reference — not yet source-verified

The Onto Innovation MP 300 Metal Film Thickness is a metrology and inspection tool for measuring metal film thickness on wafers.

How it works

General reference — not yet source-verified

A metal film thickness metrology tool measures the thickness of conductive or metallic films on wafers by making a non-contact or probe-based measurement and converting the measured signal into a thickness value.

A tool in this class is used to verify film deposition results and to monitor uniformity and process control across wafer surfaces.

Where it fits in the process flow

The MP 300 supports measurement on twelve-inch wafers.^[2]^[1]

Applications

The MP 300 is used for measuring metal film thickness on wafers in semiconductor fabrication.^[2]

The MP 300 is a metrology and inspection tool in Onto Innovation's MP 300 family.^[3]

What do the numbers mean?

Wafer handling1

Wafer sizes: 4, 6, 8, 12 inch^[1]

Configuration & options3

Refurbished^[1]
Function: Metal film thickness measurement^[2]
Category: Metrology & Inspection^[3]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the MP 300 support?

The MP 300 is designed for twelve-inch wafers.^[2]

What does the MP 300 measure?

The MP 300 measures metal film thickness.^[2]^[1]

How is the MP 300 categorized?

The MP 300 is categorized as metrology and inspection equipment.^[3]

Not publicly documented

The following facts about the MP 300 Metal Film Thickness are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MP 300 Metal Film Thickness are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MP 300 Metal Film Thickness are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MP 300 Metal Film Thickness are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MP 300 Metal Film Thickness are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MP 300 Metal Film Thickness is not on record.
Answerable by: an OEM datasheet or a fab qualification report