Waferpedia

Onto Innovation

NSX 105 Wafer Bomping

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Onto InnovationNSX 105 Wafer Bomping
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What it is

The OE Omni Innovation NSX 105 is configured for 8-inch wafers. The manufacturer of the NSX 105 is OE Omni Innovation, a company that also includes the Rudolph Technologies and August Technology brands.[2][1]

How it works

General reference — not yet source-verified

The inspection head moves over the wafer stage while the system acquires images or height data. Dedicated software analyzes the measurements to detect defects such as missing bumps, bridges, or abnormal height variations. The results are used to qualify bump quality and to provide feedback for process control.

What do the numbers mean?

Wafer handling2

Model
NSX 105 Wafer Bomping[2]
Accurate?
Wafer size
8 inch[2]
Accurate?

Configuration & options2

Manufacturer
Onto Innovation[1]
Accurate?
Category
Metrology & Inspection[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the equipment category of the NSX 105?

The NSX 105 is categorized as metrology and inspection equipment.[2][1]

Not publicly documented

The following facts about the NSX 105 Wafer Bomping are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 105 Wafer Bomping are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSX 105 Wafer Bomping are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSX 105 Wafer Bomping are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSX 105 Wafer Bomping are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSX 105 Wafer Bomping is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
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Last updated Sep 28, 2026.

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