Plasma-Therm
Unaxis 790
How it works
Where it fits in the process flow
Applications
The tool is used for anisotropic thin-film etching, photoresist descum, and silicon nitride membrane fabrication. It is also used for reactive ion etching of silicon, silicon oxide, and silicon nitride.[2][3]
What do the numbers mean?
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Unaxis 790 Middle | — | — | NIST identifies this as a specific NanoFab tool location/variant designation. | nist.gov[2] |
| Unaxis 790 Right | — | — | NIST identifies this as a specific NanoFab tool location/variant designation. | nist.gov[3] |
| Plasma-Therm Unaxis 790 Dual Chamber Shuttle Load Lock System | — | 2001 | Described as a dual chamber shuttle load lock system with PC controller, no endpoint detection, AE RF 5S generator, eight gas inputs, and loadlock. | capovani.com[4] |
| Plasma-Therm Unaxis 790 DRIE PECVD | — | — | Described with DRIE and PECVD process capability and PC controller. | semistarcorp.com[5] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Unaxis 790 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Unaxis 790 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Unaxis 790 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Unaxis 790 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Unaxis 790 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Unaxis 790 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]nist.gov — nist.govnist.gov
- [3]nist.gov — nist.govnist.gov
- [4]capovani.com — capovani.comcapovani.com
- [5]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [6]Plasmatherm Unaxis 790 | SemiStar — semistarcorp.comsemistarcorp.com
Last updated Jul 30, 2026.
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