Waferpedia

Rorze

RV 201 Load Port

Rorze RV 201 Load Port family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

RorzeRV 201 Load Port
No photo available yet

What it is

The Rorze RV 201 Load Port is a wafer handling load port used in semiconductor manufacturing equipment.[1]

The RV201 family is a load port line used for FOUP and Auto Door FOSB handling, and some variants extend the platform to glass substrates, open cassettes, and turn-type or purge configurations.[2][3][4][5][6]

How it works

The RV201 family uses a door opening and closing mechanism that precisely controls FOUP door motion and is intended to support cleanliness during carrier access.[2][3][4][5][6]

The RV201-F07-N uses an original nozzle mechanism for gas control by mass flow controller and includes a low pressure loss filter.[6]

Where it fits in the process flow

The RV201 variants are positioned for FOUP and Auto Door FOSB handling, with selected versions supporting glass substrates, 200 mm open cassette use, or coupling with stocker systems.[2][3][5]

What do the numbers mean?

Wafer handling1

Wafer size
12 inch[1]
Accurate?

Configuration & options2

Model
RV 201[1]
Accurate?
Equipment type
Load Port[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
RV201-F07-G——Available for glass substrates.rorze.com[2]
RV201-F07-T——Turn type and can be coupled with each manufacturer's stocker.rorze.com[3]
RV201-F07-0——Standard load port.rorze.com[4]
RV201-F07-C——Can handle FOUP, Auto Door FOSB, and 200 mm open cassette in one unit.rorze.com[5]
RV201-F07-N——N2 bottom purge type load port.rorze.com[6]
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What carrier types does the RV201-F07-0 support?

The RV201-F07-0 is available for FOUP and Auto Door FOSB as a standard.[4]

What special capability does the RV201-F07-G provide?

The RV201-F07-G is available for glass substrates.[2]

What defines the RV201-F07-N variant?

The RV201-F07-N is a N2 bottom purge type load port.[6]

Not publicly documented

The following facts about the RV 201 Load Port are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RV 201 Load Port are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the RV 201 Load Port are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the RV 201 Load Port are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the RV 201 Load Port is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the RV 201 Load Port are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]rorze.com — rorze.comrorze.com
  3. [3]rorze.com — rorze.comrorze.com
  4. [4]rorze.com — rorze.comrorze.com
  5. [5]rorze.com — rorze.comrorze.com
  6. [6]rorze.com — rorze.comrorze.com
Was this page accurate?

Last updated Sep 27, 2026.

Compare with similar tools

View all →