Semitool

880

Spin Rinser/Dryer 4"Semitool 880 family

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880 — nanofab.ece.cmu.edu — Fig. 01880nanofab.ece.cmu.edu^[1]

What it is

The Semitool 880 is a spin rinser/dryer.^[1]^[2]

How it works

The tool rinses masks and wafers in deionized water to 15 MΩ and dries them with heated nitrogen.^[1]

Where it fits in the process flow

The tool accepts 4-inch and 5-inch mask boats, and a 6-inch wafer boat is available on request.^[1]

What can it run?

Process applications and technology nodes documented for this tool.

Rinsing masks
Rinsing wafers
Drying masks
Drying wafers

What do the numbers mean?

Wafer handling1

Boat compatibility: 4" and 5" mask boats, plus 6" wafer boat on request^[1]

Configuration & options3

Function: Spin Rinser/Dryer^[1]
Rinse medium: DI water to 15 MΩ^[1]
Drying method: Heated nitrogen^[1]

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What replaced it?

siblingSemitool 270— Listed alongside the Semitool 270 as a Spin Rinser/Dryer in the wet chemistry equipment list.source^[2]
siblingSemitool 870— Listed alongside the 870 in the same wet chemistry equipment category.source^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What does the Semitool 880 do?

It rinses masks and wafers in deionized water to 15 MΩ and dries them with heated nitrogen.^[1]

What mask or wafer sizes does it handle?

It uses 4-inch and 5-inch mask boats, and a 6-inch wafer boat is available on request.^[1]

Not publicly documented

The following facts about the 880 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 880 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 880 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 880 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 880 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 880 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources

[1]nanofab.ece.cmu.edu — nanofab.ece.cmu.edunanofab.ece.cmu.edu
[2]Equipment - Claire & John Bertucci Nanotechnology Laboratory - College of Engineering - Carnegie Mellon University — nanofab.ece.cmu.edunanofab.ece.cmu.edu