Seren

HR 601

Seren HR 601 family

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HR 601 — Inventory photo — Fig. 01HR 601Inventory photo^[1]

Power

Single Phase^[1]

Performance

±2%^[2]

What it is

The Seren HR 601 is an RF generator used in vacuum processing systems.^[2]^[1]

How it works

The HR 601 is a solid-state, microprocessor-controlled generator with internal control and power-amplifier sections.^[2]

The HR 601 supports serial, analog, and optional remote interfaces, and the model can regulate power with voltage, current, and forward-power control modes.^[2]

Where it fits in the process flow

The HR 601 can serve as the sole source for plasma generation, as a bias generator, or as one of several generators in a multiple-generator configuration.^[2]

Applications

The HR 601 is used in vacuum processing applications that require regulated RF power for plasma generation.^[2]

The model supports pulsing and frequency tuning for process control in RF-driven vacuum equipment.^[2]

What do the numbers mean?

Power & electrical6

Single Phase^[1]
Output: 600W @13.56MHz^[1]
Forward Power Output: 600 Watts^[2]
Frequency (standard): 13.56 MHz^[3]
Frequency options: 1.7-2.1 MHz, 12.56 MHz, 13.56 MHz, 27.12 MHz, 40.68 MHz, 60.00 MHz^[4]
Input Power: 100-240 VAC, 47-63 Hz, Single Phase^[4]

Performance1

Forward Power Accuracy: ±2%^[2]

Control & software1

Interface Connectors: Serial: DB-9 Female; Analog: DB-25 Female^[2]

Dimensions & facilities3

Pulsing: 10 μs minimum pulse width, 0-100% duty cycle^[4]
Dimensions (H x W x D): 5.22" x 9.47" x 20.09" (13.26 x 24.05 x 51.02 cm)^[4]
Weight: 18 lbs (8.16 kg)^[2]

Configuration & options8

PN: 9601090003^[1]
Input: 200-240 Vac, 47-63Hz^[1]; CE Marked^[1]
Harmonics: -50 dBc^[2]
Output Connector: Type N Female^[2]
Cooling: Forced air, 153 CFM (72.2 L/s)^[4]
Part Number (PN): 9601090003^[1]
CE Marked: Yes^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
HR601 60MHz	—	—	60.00 MHz frequency, input power 200-240 VAC, dimensions 5.22" x 9.47" x 20.09"	serenips.com^[5]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationSingle Phase^[1]
Output600W @13.56MHz^[1]
Forward Power Output600 Watts^[2]
Frequency (standard)13.56 MHz^[3]
Frequency options1.7-2.1 MHz, 12.56 MHz, 13.56 MHz, 27.12 MHz, 40.68 MHz, 60.00 MHz^[4]
Input Power100-240 VAC, 47-63 Hz, Single Phase^[4]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What output power does the HR 601 provide?

The HR 601 provides 600 W of forward power output.^[1]^[3]^[2]^[4]

Not publicly documented

The following facts about the HR 601 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HR 601 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the HR 601 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the HR 601 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the HR 601 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the HR 601 are on record.
Answerable by: an OEM parts catalog or a service engineer