Waferpedia

Signatone

S-1060R

thermal probing system4 inSignatone S-1060R family
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SignatoneS-1060R
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Wafer size

4 in

Power

Approx. 10 nA[1]

Performance

±1°C[1]

Optics

1°C[1]

What is it?

The source describes the Signatone S-1060R as a 4-inch hot chuck data sheet for a thermal probing system. It lists thermal and mechanical specifications including a temperature range from ambient to 600°C, temperature accuracy and uniformity of ±1°C, a chuck actual diameter of 4.5 inches, and controller model 1060R with rack-mount dimensions.

What can it run?

Process applications and technology nodes documented for this tool.

  • characterizing wafers and packaged devices
  • liquid crystal hot spot detection
  • engineering applications
  • production and engineering
  • low current probing
  • flat panel probing

What do the numbers mean?

Power & electrical2

electrical noise floor
Approx. 10 nA[1]
Accurate?
power options
110V/20A; 220V/10A[1]
Accurate?

Wafer handling4

product type
thermal probing systems / hot chuck[1]
Accurate?
wafer size
4 in[1]
Accurate?
chuck actual diameter
4.5 in[1]
Accurate?
chuck height
1.25 in[1]
Accurate?

Optics & imaging1

temperature resolution
1°C[1]
Accurate?

Performance2

temperature accuracy
±1°C[1]
Accurate?
temperature uniformity
±1°C[1]
Accurate?

Control & software1

controller model
1060R[1]
Accurate?

Dimensions & facilities3

rack width
19 in (483 mm)[1]
Accurate?
rack height
7 in (178 mm)[1]
Accurate?
rack depth
20 in (508 mm)[1]
Accurate?

Configuration & options6

model
S-1060R[1]
Accurate?
temperature range
Ambient to 600°C[1]
Accurate?
surface flatness
0.005 in TIR across temp range[1]
Accurate?
surface/base expansion
Typical 0.010 in across temp range[1]
Accurate?
surface to ground isolation
10^6 ohms; 10^14 ohms available with triax top[1]
Accurate?
surface to ground capacitance
<300 pF[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • electrical noise floorApprox. 10 nA[1]
  • power options110V/20A; 220V/10A[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the S-1060R are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S-1060R are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S-1060R are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S-1060R are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S-1060R are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S-1060R is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Sep 22, 2026.