Waferpedia

SMC

HRS 200 AN 46 S Chiller

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The SMC HRS 200 AN 46 S Chiller is a chiller with a rated current of 17 A and a capacity of 10 kA. The SMC HRS 200 AN 46 S Chiller supports power inputs of 380-415 V at 50 Hz and 460-480 V at 60 Hz. The SMC HRS 200 AN 46 S Chiller was manufactured in 2020.[1]

HRS 200 AN 46 S Chiller — Inventory photo
Fig. 01HRS 200 AN 46 S ChillerInventory photo[1]

What it is

General reference — not yet source-verified

The SMC HRS 200 AN 46 S Chiller is a chiller used as lab and support equipment.

How it works

General reference — not yet source-verified

A chiller removes heat from a connected load and transfers that heat to a secondary medium so the load can remain at a controlled temperature.

Process chillers in laboratory and support settings circulate conditioned fluid through external equipment and return it after heat exchange.

Where it fits in the process flow

General reference — not yet source-verified

The SMC HRS 200 AN 46 S Chiller belongs in support infrastructure rather than in the primary wafer-processing path.

A chiller commonly supports tools and subsystems that need stable thermal control during operation.

Applications

General reference — not yet source-verified

The SMC HRS 200 AN 46 S Chiller is used in laboratory and equipment-support contexts where thermal management is required.

A chiller of this class can support instrumentation, process modules, and other heat-generating equipment that benefits from controlled cooling.

What do the numbers mean?

Power & electrical1

Power Supply
380-415 V, 50 Hz / 460-480 V, 60 Hz[1]
Accurate?

Configuration & options3

Capacity
10 kA[1]
Accurate?
Current
17 A[1]
Accurate?
Vintage
2020[1]
Accurate?

Observed configurations

How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.

Unit as listed[1]

  • Power: 380-415 V, 50 Hz and 460-480 V, 60 Hz
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power Supply380-415 V, 50 Hz / 460-480 V, 60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is this?

The equipment is a chiller.[1]

Not publicly documented

The following facts about the HRS 200 AN 46 S Chiller are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HRS 200 AN 46 S Chiller are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the HRS 200 AN 46 S Chiller are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the HRS 200 AN 46 S Chiller are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HRS 200 AN 46 S Chiller are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the HRS 200 AN 46 S Chiller is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Oct 4, 2026.

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