SPTS
MVD100E
The SPTS MVD100E is a Molecular Vapor Deposition system. The SPTS MVD100E is designated for research and development or pilot manufacturing. The SPTS MVD100E handles 200mm wafers.[1][2]
What it is
How it works
The MVD100E has a small chamber volume designed for fast processing.[1][3]
The chamber opens from the top to ease maintenance and cleaning.[1][3]
The system includes integrated plasma surface treatment and a chamber clean capability.[1][3]
Automated process sequence routines and extensive self-diagnostic and data logging capabilities are provided.[1][3]
Where it fits in the process flow
Applications
The MVD100E is used for MEMS devices, including sensors, actuators, displays, RF switches, inkjets, and data storage devices.[1][3]
BioMEMS applications include wetting control in micro-fluidics, such as lab-on-a-chip and microplates, as well as passivation on implantable devices and functionalized surface coatings for genome sequencing and diagnostics.[1][3]
The system finds use in production applications requiring moisture barriers, anticorrosion coatings, or release layers for imprinting.[1][3]
- MEMS devices
- sensors
- actuators
- displays
- RF switches
- inkjets
- data storage devices
- BioMEMS
- wetting control in micro-fluidics
- lab-on-a-chip
- microplates
- passivation on implantable devices requiring biocompatible surface coatings
- devices requiring functionalized surface coatings
- genome sequencing
- diagnostics
- production applications requiring moisture barriers
- anticorrosion coatings
- release layers for imprinting
What do the numbers mean?
Wafer handling4
Configuration & options12
- diagnostics
- Exceptional reliability with extensive self-diagnostic and data logging capability[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the MVD100E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MVD100E are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MVD100E are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MVD100E are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MVD100E are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MVD100E is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]atomiclayerdeposition.com — atomiclayerdeposition.comatomiclayerdeposition.com
- [3]MVD100E — SPTS | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 6, 2026.
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